@HwangSaw Glad to know that issue is resolved and thanks for sharing the resolution here. For community benefit, resharing the resolution suggested on tech community here.
The current method for monitoring a process is by setting up a performance counter on the workspace to send data into the Perf table. For example, you could use Process(*)\% Processor Time.
VMProcess is a metadata table used for Service Map an Azure Monitor for VMs. For more details, you can see the docs here.