If you want the data to be on a single line without merging, you can append the tables and then GROUP the records. Your "Grouping" fields would be the Date, Main ID and Sub ID and then use an aggregator on the other fields (SUM, MAX, etc) to consolidate the nulls and the values into a single line.
- First append
- Then Group
Note that you use List.SUM or List.Max in the aggregations so the nulls dont cause errors.
Table.Group(Source, {"Date", "Main ID", "Sub ID"}, {{"sent", each List.Max([sent]), type nullable text}, {"delivered", each List.Max([delivered]), type nullable text}, {"Opens", each List.Max([Opens]), type nullable text}, {"Clicks", each List.Max([Clicks]), type nullable text}})