Hi!
I opened a support ticket and after 12 days of waiting I've got an answer from support engineer which fixed the problem.
The issue is described here https://social.technet.microsoft.com/Forums/ie/en-US/2229748b-b083-4bd1-9410-888ecbbdc987/url-is-not-valid-error-when-attempting-to-publish-internet-calendar-exchange-2010-sp1?forum=exchange2010
I checked my internal and external URL for OWA virtual directory and both was just owa.domain.ru, changing both to owa.domain.ru/owa fixed the problem.
Not sure this is good solution because previously it worked fine with this settings
but it works so I'll just check that no other issues will appear.