ProcMon.exe Eating up System Memory

Question

Hello,

I am using Process Monitor to gather hardware utilization information over a given period of time. It appears that even if I set a backing file to the disk, ProcMon.exe continues to eat up system memory.

For example, over a 2 hour monitoring session, ProcMon.exe started at 1.2 MB of usage and now sits at 83 MB of usage as of writing this. I would not expect this to occur if events are being written to the disk. Will this tool continue to eat up memory as it runs? I was planning to use Process Monitor to monitor hardware utilization over a period of several days.